JPH01126048U - - Google Patents
Info
- Publication number
- JPH01126048U JPH01126048U JP2103088U JP2103088U JPH01126048U JP H01126048 U JPH01126048 U JP H01126048U JP 2103088 U JP2103088 U JP 2103088U JP 2103088 U JP2103088 U JP 2103088U JP H01126048 U JPH01126048 U JP H01126048U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- ion implantation
- implantation apparatus
- mount
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 12
- 239000004065 semiconductor Substances 0.000 claims description 10
- 238000005468 ion implantation Methods 0.000 claims description 3
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2103088U JPH01126048U (en]) | 1988-02-19 | 1988-02-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2103088U JPH01126048U (en]) | 1988-02-19 | 1988-02-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01126048U true JPH01126048U (en]) | 1989-08-29 |
Family
ID=31237899
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2103088U Pending JPH01126048U (en]) | 1988-02-19 | 1988-02-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01126048U (en]) |
-
1988
- 1988-02-19 JP JP2103088U patent/JPH01126048U/ja active Pending